Facility

Center for Nanoscale Science and Technology

Department

Physics and Astronomy

Location

ENPH B05

Director

Teizer, Winfried:

Office Phone: 979.845.7730

Email: teizer@tamu.edu,

Website: http://faculty.physics.tamu.edu/teizer

Manager

Woo, Sung Oh

Email: sungoh77@physics.tamu.edu

Clean room: 979.845.7843

Rate

$23 per hour

Maximum $460 per each PI or group for a month

Gallery

Nanodevice gallery

Purpose

The Center for Nanoscale Science and Technology will be built into the core of a top down fabrication facility for nanodevices. Using state of the art nanolithography, the center will be able to produce structures on the nanometer scale; thereby complementing the facility in CIMS, where micrometer sized structures can be grown.

Equipment

1. Clean Room

2.  JEOL JSM 6460 with laser stage

-. Scanning Electron Microscopy (SEM, Highest magnification: 300,000 )

-. Electron Beam Lithography

-. DEBEN Laser stage with high precision control

JSM6460

3. Spin coating system for PMMA

-. Spin Coater

-. Sonicator

- Two hot plates

PMMA coating system

4. DC sputter

DC sputter

5. Optical Microscope with Digital Camera

-. OPTIPHOT 66 (100 objective lens)

-. CFM-USB-4 digital camera

IMG_8727